Layout Method

ABSTRACT

A semiconductor device includes circuit active fin lines and circuit gate lines intersecting each other in a circuit active region, dummy active fin lines and dummy gate lines intersecting each other in a dummy active region, the active fin lines and the dummy active fin lines having same width and pitch, and the circuit gate lines and the dummy gate lines having same width and pitch, wherein at least some of the dummy active fin lines are aligned with and collinear with respective circuit active fin lines, and at least some of the dummy gate lines are aligned with and collinear with respective circuit gate lines.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a divisional application based on pending application Ser. No. 15/902,025, filed Feb. 22, 2018, which in turn is a division of application Ser. No. 15/372,840, filed Dec. 8, 2016, now U.S. Pat. No. 9,929,156 B2, Mar. 27, 2018, the entire contents of which is hereby incorporated by reference.

Korean Patent Application No. 10-2016-0041563, filed on Apr. 5, 2016, in the Korean Intellectual Property Office, and entitled: “Layout Method and Semiconductor Device,” is incorporated by reference herein in its entirety.

BACKGROUND 1. Field

Example embodiments relate to a layout method, a method of manufacturing a semiconductor device using the same, a semiconductor device thereof, and an electronic system selecting the same.

2. Description of the Related Art

As semiconductor devices tend to be highly integrated, transistors have gradually been miniaturized, and short channel effects of transistors are further increased. In order to suppress short channel effects, a fin field effect transistor (FinFET) structure has been proposed. As miniaturized transistors having a FinFET structure are manufactured, unexpected defects may occur, thereby reducing yields and productivity.

SUMMARY

In accordance with example embodiments, a layout method may include forming circuit active fin lines and circuit gate lines to intersect the circuit active fin lines in a layout region, identifying a vacant region in the layout region, setting a grid map in the vacant region using a grid unit, and forming dummy active fin lines and dummy gate lines within the grid map using a cell unit, wherein the grid unit has a quadrangular shape having first and second sides opposing each other and third and fourth sides opposing each other, and wherein the cell unit includes an active fin unit connecting middle portions of the first and second sides of the grid unit to each other, and a gate unit connecting middle portions of the third and fourth sides of the grid unit to each other and intersecting the active fin unit.

In accordance with other example embodiments, a layout method may include forming first circuit active fin lines and first circuit gate lines intersecting the first circuit active fin lines in a layout region, the first circuit active fin lines being formed at a first pitch and the first circuit gate lines being formed at a second pitch, identifying a vacant region in the first layout region, setting a grid map in the vacant region, and forming dummy active fin lines and dummy gate lines in the vacant region in which the grid map is set, wherein setting the grid map includes forming a plurality of grid units, and arranging the plurality of grid units in the vacant region, wherein forming the dummy active fin lines and the dummy gate lines includes forming a plurality of cell units by interposing a cell unit between the plurality of grid units, wherein the cell unit includes an active fin unit and a gate unit intersecting each other; and wherein an intersection region of the active fin unit and the gate unit of the cell unit is disposed in a central portion of the grid unit.

In accordance with other example embodiments, a semiconductor device may include a circuit region and a dummy region. The dummy region includes a first dummy region and a second dummy region, and the circuit region includes a first circuit region opposing the first dummy region and a second circuit region spaced apart from the first dummy region. Circuit active fin patterns are disposed in the circuit region. Dummy active fin patterns are disposed in the dummy region and are disposed at the same pitch as a pitch of the circuit active fin patterns. Circuit gate lines are disposed in the circuit region. Dummy gate lines are disposed in the dummy region and are disposed at the same pitch as a pitch of the circuit gate lines. A density of the dummy active fin patterns disposed in the first dummy region is different from a density of the circuit active fin patterns disposed in the first circuit region, and a density of the dummy active fin patterns disposed in the second dummy region is different from a density of the dummy active fin patterns disposed in the first dummy region.

In accordance with other example embodiments, a semiconductor device may include a circuit region and a dummy region adjacent to each other. Circuit active fin patterns having a linear shape extended in a first direction may be disposed in the circuit region. Dummy active fin patterns having a linear shape extended in the first direction may be disposed in the dummy region. The dummy active fin patterns include first-side fin patterns having end portions opposing end portions of the circuit active fin patterns. Circuit gate lines intersecting the circuit active fin patterns may be disposed in the circuit region. Dummy gate lines having end portions opposing end portions of the circuit gate lines may be disposed in the dummy region. Sides of the circuit active fin patterns and sides of the first-side fin patterns are aligned with each other, and sides of the circuit gate lines and sides of the dummy gate lines are aligned with each other.

In accordance with other example embodiments, a semiconductor device may include circuit active fin lines and circuit gate lines intersecting each other in a circuit active region, dummy active fin lines and dummy gate lines intersecting each other in a dummy active region, the active fin lines and the dummy active fin lines having same width and pitch, and the circuit gate lines and the dummy gate lines having same width and pitch, wherein at least some of the dummy active fin lines are aligned with and collinear with respective active fin lines, and at least some of the dummy gate lines are aligned with and collinear with respective circuit gate lines.

BRIEF DESCRIPTION OF DRAWINGS

Features will become apparent to those of ordinary skill in the art by describing in detail exemplary embodiments with reference to the attached drawings, in which:

FIG. 1 illustrates a flowchart of an example of a semiconductor device layout method according to an example embodiment;

FIGS. 2A to 2D illustrate plan views of stages in an example of a semiconductor device layout method according to an example embodiment;

FIGS. 3A to 4B illustrate plan views of an example of a semiconductor device layout method according to an example embodiment;

FIGS. 5, 6A and 6B illustrate plan views of another example of a semiconductor device layout method according to an example embodiment;

FIG. 7 illustrates a plan view of another example of a semiconductor device layout method according to an example embodiment;

FIG. 8 illustrates a plan view of another example of a semiconductor device layout method according to an example embodiment;

FIG. 9 illustrates a flowchart of an example of a semiconductor device layout method according to an example embodiment;

FIGS. 10A to 10C illustrate plan views of an example of a semiconductor device layout method according to an example embodiment;

FIGS. 11A to 11D illustrate plan views of an example of a semiconductor device layout method according to an example embodiment;

FIG. 12 illustrates a conceptual view of a semiconductor device according to example embodiments;

FIG. 13 illustrates a plan view of a semiconductor device according to example embodiments;

FIG. 14 illustrates a cross-sectional view of a semiconductor device according to example embodiments;

FIGS. 15, 16, 17A and 17B illustrate plan views of a semiconductor device according to an example embodiment;

FIGS. 18A and 18B illustrate cross-sectional views of a semiconductor device according to an example embodiment;

FIG. 19 illustrates a plan view of another example of a semiconductor device according to an example embodiment;

FIG. 20 illustrates a cross-sectional view of a semiconductor device according to an example embodiment;

FIG. 21 illustrates a conceptual diagram of a semiconductor device according to example embodiments;

FIG. 22 illustrates a conceptual view of a semiconductor device according to an example embodiment;

FIG. 23 illustrates a plan view of an example of a semiconductor device according to an example embodiment;

FIG. 24 illustrates a plan view of an example of a semiconductor device according to an example embodiment;

FIG. 25 illustrates a plan view of an example of a semiconductor device according to an example embodiment;

FIG. 26 illustrates a plan view of an example of a semiconductor device according to an example embodiment;

FIG. 27 illustrates a plan view of a semiconductor device according to an example embodiment;

FIG. 28 illustrates a plan view of a semiconductor device according to an example embodiment;

FIG. 29 illustrates a cross-sectional view of a semiconductor device according to an example embodiment; and

FIGS. 30 to 35B illustrate views of stages in a method of manufacturing a semiconductor device according to an example embodiment.

DETAILED DESCRIPTION

With reference to FIGS. 1 to 12, semiconductor device layout methods according to example embodiments, layouts formed using the layout methods, regions in which the layouts may be disposed, and target patterns for the formation of the layouts will be described below.

In FIGS. 1 to 12, FIGS. 1 to 9 are drawings illustrating semiconductor device layout methods according to example embodiments and layouts formed using the layout methods. FIGS. 10A to 10C are drawings illustrating regions in which layouts formed using semiconductor device layout methods according to example embodiments are disposed. FIGS. 11A to 12 are drawings illustrating an example of target patterns targeted at layouts in semiconductor device layout methods according to example embodiments.

First, a semiconductor device layout method according to an example embodiment will be described with reference to FIGS. 1 to 4B. In FIGS. 1 to 4B, FIG. 1 is a flowchart illustrating an example of a semiconductor device layout method according to an example embodiment, FIGS. 2A to 2D are plan views illustrating an example of a semiconductor device layout method according to an example embodiment, and FIGS. 3A to 4B are plan views illustrating an example of a semiconductor device layout method according to an example embodiment.

With reference to FIGS. 1 to 2B, a design rule may be determined in operation S5. Determining the design rule may include determining active fin units 3 of a first pitch Pa and gate units 6 of a second pitch Pg.

In detail, the determination of the design rule may include determining a first width Wa of each active fin unit 3 and a first distance Sa between adjacent active fin units 3, and determining a second distance Sg between adjacent gate units 6. That is, each of the active fin units 3 may have a first width Wa, and the active fin units 3 may be spaced apart from each other by the first distance Sa. Each of the gate units 6 may have a second width Wg, and the gate units 6 may be spaced apart from each other by a second distance Sg.

The first pitch Pa of the active fin units 3 may be a sum of the first width Wa of the active fin unit 3 and the first distance Sa between the active fin units 3, i.e., Pa=Wa+Sa. The second pitch Pg of the gate units 6 may be a sum of the second width Wg of the gate unit 6 and the second distance Sg between the gate units 6, i.e., Pg=Wg+Sg.

In an example, the active fin units 3 and the gate units 6 may be constituent elements configuring a transistor having a FinFET structure. For example, the active fin units 3 may be active fins in which a channel region of a transistor having a FinFET structure may be formed, and the gate units 6 may be gate electrodes of a transistor having a FinFET structure.

With reference to FIGS. 1 to 2C, the determination of the design rule may further include determining, e.g., marking, a grid unit 9 using the first pitch Pa and the second pitch Pg.

The grid unit 9 may have a quadrangular shape. A transversal length of the grid unit 9 may be determined by the second pitch Pg of the gate units 6, and a longitudinal length of the grid unit 9 may be determined by the first pitch Pa of the active fin units 3. Thus, the transversal length of the grid unit 9 may be the same as the second pitch Pg, and the longitudinal length of the grid unit 9 may be the same as the first pitch Pa.

With reference to FIGS. 1 to 2D, the determination of the design rule may further include determining a cell unit 12.

Determining the cell unit 12 may include disposing the active fin unit 3 and the gate unit 6 in the grid unit 9. The cell unit 12 may include the active fin unit 3 and the gate unit 6 intersecting each other in the grid unit 9.

In the cell unit 12, the active fin unit 3 may have the first width Wa and a first length Pg having the same size as the second pitch Pg. In the cell unit 12, the gate unit 6 may have the second width Wg and a second length Pa having the same size as the first pitch Pa. Thus, a length of the active fin unit 3 may be the same as the second pitch Pg, and a length of the gate unit 6 may be the same as the first pitch Pa.

The active fin unit 3 of the cell unit 12 may be disposed to connect middle portions of two sides of the grid unit 9, and the gate unit 6 of the cell unit 12 may be disposed to connect middle portions of a lower surface of the grid unit 9 and an upper surface of the grid unit 9.

The active fin unit 3 and the gate unit 6 of the cell unit 12 may be intersected with each other in the grid unit 9. An intersection region CR of the active fin unit 3 and the gate unit 6 in the cell unit 12 may be a central portion of the grid unit 9.

The grid unit 9 may have a quadrangular shape with first and second sides Sa1 and Sa2 opposing each other, and third and fourth sides Sa3 and Sa4 opposing each other. The cell unit 12 may include the active fin unit 3 connecting middle portions of the first and second sides Sa1 and Sa2 of the grid unit 9 to each other, and the gate unit 6 intersecting the active fin unit 3 while connecting middle portions of the third and fourth sides Sa3 and Sa4 of the grid unit 9 to each other.

In the cell unit 12, the active fin unit 3 may be extended from the intersection region CR with respect to the gate unit 6 by an amount equal to half (Sg/2) of the second distance Sg. In the cell unit 12, the gate unit 6 may be extended from the intersection region CR with respect to the active fin unit 3 by an amount equal to half (Sa/2) of the first distance Sa.

With reference to FIGS. 1 to 3A, circuit active fin lines 3 c and circuit gate lines 6 c may be formed in a layout region 20, in operation S10. The layout region 20 may be provided as a display of a computer.

In an example, the layout region 20 may be a region in which patterns formed at the same pitch on a same plane and a same layer are disposed. For example, the layout region 20 may be a region in which active fins having the same pitch and gate lines having the same pitch are formed.

The circuit active fin lines 3 c may be formed using the active fin units 3 formed at the first pitch Pa. Thus, the circuit active fin lines 3 c may be formed at the first pitch Pa. The circuit active fin lines 3 c may be formed using the first pitch Pa, the first width Wa, and the first distance Sa determined by the design rule. The circuit active fin lines 3 c may be formed to have the first width Wa equal to that of the active fin units 3. A distance between the circuit active fin lines 3 c may be the same as the first distance Sa between the active fin units 3.

The circuit gate lines 6 c may be formed using the gate units 6 formed at the second pitch Pg. Thus, the circuit gate lines 6 c may be formed at the second pitch Pg. The circuit gate lines 6 c may be formed using the second pitch Pg, the second width Wg, and the second distance Sg determined by the design rule. The circuit gate lines 6 c may be formed to have the second width Wg equal to that of the gate units 6. A distance between the circuit gate lines 6 c may be the same as the second distance Sg between the gate units 6.

The circuit active fin lines 3 c may have a linear shape extended in a first direction X, and the circuit gate lines 6 c may have a linear shape extended in a second direction Y perpendicular to the first direction X. In an example, the circuit active fin lines 3 c and the circuit gate lines 6 c may intersect each other to form intersection regions CR as illustrated in FIG. 2D. End portions of the circuit active fin lines 3 c may extend from the intersection regions CR by an amount equal to half (Sg/2) of the second distance Sg described above with reference to FIG. 2D in the first direction X. End portions of the circuit gate lines 6 c may extend from the intersection regions CR by an amount equal to half (Sa/2) of the first distance Sa described above with reference to FIG. 2D, in the second direction Y.

In an example, the circuit active fin lines 3 c and the circuit gate lines 6 c may be formed simultaneously with each other, but are not limited thereto. For example, the circuit gate lines 6 c may be formed after the circuit active fin lines 3 c are formed, or the circuit active fin lines 3 c may be formed after the circuit gate lines 6 c are formed.

An empty space or a vacant region 24 in the layout region 20 may be identified in operation S15. Identifying the vacant region 24 may be undertaken by determining a region in which the circuit active fin lines 3 c and the circuit gate lines 6 c are not formed to be a vacant area.

With reference to FIGS. 1 to 3B, a grid map 27 may be established, e.g., defined, in the vacant region 24 using the grid unit 9 (see FIG. 2C), in operation S25.

In the case of the grid unit 9 (FIG. 2C), a plurality of grid units 9 may be disposed, e.g., defined, in the vacant region 24 in the first direction X and the second direction Y. The grid units 9 in the grid map 27 may be disposed, e.g., marked, to be aligned with end portions of the circuit active fin lines 3 c and the circuit gate lines 6 c. For example, end portions of the circuit active fin lines 3 c may be aligned with middle portions of the grid units 9 in the first direction X in the grid map 27, and end portions of the circuit gate lines 6 c may be aligned with middle portions of the grid units 9 in the first direction X in the grid map 27.

Establishing the grid map 27 in the vacant region 24 using the grid units 9 (FIG. 2C) may include forming, e.g., marking, the grid units 9 from a vacant region adjacent to the end portions of the circuit active fin lines 3 c or the end portions of the circuit gate lines 6 c. For example, the establishment of the grid map 27 in the vacant region 24 using the grid units 9 (FIG. 2C) may include first forming grid units 9 in contact with end portions of the circuit active fin lines 3 c and the circuit gate lines 6 c, and based on the grid units 9 formed as above, forming grid units 9 in a remaining vacant region.

As illustrated in FIG. 3A, the end portions of the circuit active fin lines 3 c may be extended from the intersection regions CR by an amount equal to half (Sg/2) of the second distance Sg, and the end portions of the circuit gate lines 6 c may be extended from the intersection regions CR by an amount equal to half (Sa/2) of the first distance Sa described above with reference to FIG. 2D. Thus, the grid units 9 in contact with the end portions of the circuit active fin lines 3 c and the end portions of the circuit gate lines 6 c may first be formed, and then, based on the grid units 9 formed as above, grid units 9 may be foiined in the remaining vacant region, thereby forming the grid units 9 in the vacant region 24 without an idle vacant region.

With reference to FIG. 1, FIGS. 2A to 2D, FIG. 3C, FIG. 4A and FIG. 4B, inserting a cell unit 12 (see FIG. 2D) into the grid map 27 may be performed in operation S30. That is, the cell units 12 (FIG. 2D) may be interposed among the grid units 9 provided in the grid map 27, to form dummy active fin lines 3 d and dummy gate lines 6 d, e.g., each cell unit may be formed in a respective grid unit 9 of the grid map 27.

The dummy active fin lines 3 d may have a linear shape extended in the first direction X, and the dummy gate lines 6 d may have a linear shape extended in the second direction Y. The dummy active fin lines 3 d may be formed by allowing the active fin units 3 (FIG. 2D) of the cell units 12 (FIG. 2D) to be continuously connected thereto, and the dummy gate lines 6 d may be formed by allowing the gate units 6 (FIG. 2D) of the cell units 12 (FIG. 2D) to be continuously connected thereto.

The dummy active fin lines 3 d may include first-side dummy active fin lines 3 d_1 extended from the circuit active fin lines 3 c and second side dummy active fin lines 3 d_2 parallel to the circuit active fin lines 3 c. For example, as illustrated in FIG. 3C, the first-side dummy active fin lines 3 d_1 may be directly connected to and collinear with respective circuit active fin lines 3 c to extend therefrom, and the second side dummy active fin lines 3 d_2 may extend in parallel to the connected first-side dummy active fin lines 3 d_1 and circuit active fin lines 3 c, e.g., below the circuit active fin lines 3 c in FIG. 3C.

The dummy gate lines 6 d may include first-side dummy gate lines 6 d_1 extended from the circuit gate lines 6 c and second-side dummy gate lines 6 d_2 parallel to the circuit gate lines 6 c. For example, as illustrated in FIG. 3C, the first-side dummy gate lines 6 d_1 may be directly connected to and collinear with respective circuit gate lines 6 c to extend therefrom, and the second side dummy gate lines 6 d_2 may extend in parallel to the connected first-side dummy gate lines 6 d_1 and circuit gate lines 6 c, e.g., on the left side of the circuit gate lines 6 c in FIG. 3C

The circuit active fin lines 3 c and the dummy active fin lines 3 d may form active fin lines 4 (FIG. 4A), and the circuit gate lines 6 c and the dummy gate lines 6 d may form gate lines 7 (FIG. 4B). The active fin lines 4 and the gate lines 7 may be discriminated, e.g., distinguished, from each other as different layers or different planar layers. For example, an active fin layout 20 a configured of the active fin lines 4 illustrated in FIG. 4A, and a gate layout 20 b configured of the gate lines 7 illustrated in FIG. 4B may be formed as separate layers.

The active fin layout 20 a configured of the active fin lines 4, as illustrated in FIG. 4A, may be used to manufacture a separate photomask, and the photomask may be used in a process of manufacturing a semiconductor device. The gate layout 20 b configured of the gate lines 7, as illustrated in FIG. 4B, may be used to manufacture a separate photomask, and the photomask may be used in a process of manufacturing a semiconductor device. Thus, in the semiconductor device forming process, the active fin layout 20 a configured of the active fin lines 4, as illustrated in FIG. 4A, and the gate layout 20 b configured of the gate lines 7, as illustrated in FIG. 4B, may be used.

A first layout may be formed using a method as described above with reference to FIGS. 1 to 4B, and then, a second layout may be formed, e.g., on the structure illustrated in FIG. 3C. An example of the second layout will be described below with reference to FIGS. 5 to 6B.

FIGS. 5, 6A, and 6B are plan views illustrating a method of forming a layout in which final patterns may be formed using the active fin layout 20 a (FIG. 4A) configured of the active fin lines 4, as illustrated in FIG. 4A, and the gate layout 20 b (FIG. 4B) configured of the gate lines 7, as illustrated in FIG. 4B. FIG. 5 depicts a layout region 21 including active layout patterns 50 c and 50 d and a gate layout pattern 60, as well as the active fin lines 4 and the gate lines 7 illustrated in FIG. 3C. FIG. 6A is a drawing of a layout 21 a illustrating an example of the active layout patterns 50 c and 50 d, and FIG. 6B is a drawing of a layout 21 b illustrating the gate layout pattern 60.

First, referring to FIGS. 3C, 5, 6A and 6B, the active layout patterns 50 c and 50 d, and the gate layout pattern 60 may be formed in the layout region 21, e.g., on the active fin lines 4 and gate lines 7.

The active layout patterns 50 c and 50 d may include the active layout pattern 50 c overlapping the circuit active fin lines 3 c of the active fin lines 4, and dummy active layout patterns 50 d overlapping the dummy active pin lines 3 d of the active fin lines 4 (FIG. 5 in view of FIG. 6A). The gate layout pattern 60 may be formed in such a manner that a portion of the gate lines 7 are cut (FIG. 5 in view of FIG. 6B). For example, the gate layout pattern 60 may be formed to open a distance between the dummy gate lines 6 d and the circuit gate lines 6 c.

The active layout patterns 50 c and 50 d and the gate layout pattern 60 may be discriminated, e.g., distinguished, from each other as different layers or different planar surfaces. For example, the layout 21 a configured of the active layout patterns 50 c and 50 d, as illustrated in FIG. 6A, and the layout 21 b configured of the gate layout pattern 60, as illustrated in FIG. 6B, may be formed as separate layers.

The layout 21 a configured of the active layout patterns 50 c and 50 d, as illustrated in FIG. 6A, may be used for manufacturing a separate photomask, and this photomask may be used for a process in which a semiconductor device is formed. The layout 21 b configured of the gate layout pattern 60, as illustrated in FIG. 6B, may be used for manufacturing a separate photomask, and this photomask may be used in a process in which a semiconductor device is formed. In an example, after the active fin lines 4 are formed using the layout 20 a (FIG. 4A), the active fin lines 4 may be patterned using the active layout patterns 50 c and 50 d of the layout 21 a (FIG. 6A), thereby forming final active fin patterns in a semiconductor device. In another example, after the gate lines 7 are formed using the layout 20 b (FIG. 4B), the gate lines 7 may be patterned using the gate layout pattern 60 of the layout 21 b (FIG. 6B) to form final gate lines to be used as gate electrodes in a semiconductor device.

In FIG. 6A, the dummy active layout pattern 50 d may have a linear shape extended in the first direction X, but is not limited thereto. Examples of shapes of the dummy active layout pattern 50 d will be described with reference to FIGS. 7 and 8. FIG. 7 illustrates a layout 21 a′ illustrating a modified example 50 d′ of the dummy active layout pattern, and FIG. 8 illustrates a layout 21 a″ illustrating another modified example 50 d″ of the dummy active layout pattern.

With reference to FIG. 7, the dummy active layout pattern 50 d′ may have a form extended lengthwise in the first direction X. The dummy active layout pattern 50 d′ may include first and second portions 50 d′_1 and 50 d′_2 having different widths along the Y direction, while having a form extended lengthwise in the first direction X. For example, the first portion 50 d′_1 may have a width smaller than the second portion 50 d′_2, but is not limited thereto. For example, a portion of the dummy active layout pattern 50 d′ opposing, e.g., facing, a portion of the circuit active layout pattern 50 c having a relatively large planar area may be formed to have a relatively narrow width, and a portion of the dummy active layout pattern 50 d′ opposing, e.g., facing, a portion of the circuit active layout pattern 50 c having a relatively small planar area may be formed to have a relatively great width.

In detail, the dummy active layout pattern 50 d′ may have two sides parallel to each other in the first direction X, and one of the two sides may be indented. For example, a first side of the dummy active layout pattern 50 d′ opposing, e.g., facing, the circuit active layout pattern 50 c may be curved, e.g., indented, and a second side of the dummy active layout pattern 50 d′ opposing the first side may be linear, e.g., straight, but are not limited thereto. For example, both of the first and second sides of the dummy active layout pattern 50 d′ may be curved.

With reference to FIG. 8, a dummy active layout pattern 50 d″ may be disposed in an island form. For example, the dummy active layout pattern 50 d″ may be disposed as multiple island forms spaced apart from each other, e.g., along X and Y directions.

Next, another example of the semiconductor device layout will be described with reference to FIGS. 9 to 11D. First, another example of a layout method will be described with reference to FIGS. 9 to 10C. FIG. 9 is a flowchart illustrating an example of a semiconductor device layout method according to an example embodiment, and FIGS. 10A to 10C are plan views illustrating an example of a semiconductor device layout method according to an example embodiment.

With reference to FIGS. 9 and 10A, a design rule may be determined in operation S105. Determining the design rule may be identical to determining the design rule described above with reference to FIGS. 1 to 2D. Thus, as described above with reference to FIGS. 1 to 2D, the active fin units 3 (FIG. 2A) with the first pitch Pa, the gate units 6 (FIG. 2B) with the second pitch Pg, the grid unit 9 (FIG. 2C), and the cell unit 12 (FIG. 2D) may be determined.

Circuit active fin lines 3 c and circuit gate lines 6 c may be formed in a layout region 20′ using the same method as that described above with reference to FIGS. 1 and 3A, in operation S110. In an example, the layout region 20′ may be a region of layout of patterns which are formed using the active fin units 3 with the first pitch Pa and the gate units 6 with the second pitch Pg. In an example, the layout region 20′ may be adjacent to another layout region 22, in which patterns having pitches different from the first and second pitches Pa and Pg are formed.

A vacant region 24′ in the layout region 20′ may be identified in operation S115. The vacant region 24′ may be a region of the layout region 20′ in which the circuit active fin lines 3 c and the circuit gate lines 6 c are not formed. A grid map 27′ may be established in the vacant space 24′ using the grid units 9 (see FIG. 2C) as described above with reference to FIG. 2C, in operation S120. The establishment of the grid map 27′ may be performed using the substantially same method as the method of establishing the grid map 27 with reference to FIG. 3B. For example, the establishment of the grid map 27′ may include arranging the grid units 9 from end portions of the circuit active fin lines 3 c and the circuit gate lines 6 c.

In an example, in the grid units 9 of the grid map 27′, overlapping grid units 30 overlapping a boundary portion BR of the different layout region 22 may occur. The different layout region 22 may be a layout region in which active patterns formed to have a pitch different from that of the circuit active fin lines 3 c while being formed together with the circuit active fin lines 3 c on the same plane, and gate patterns formed to have a pitch different from that of the circuit gate lines 6 c while being formed together with the circuit gate lines 6 c on the same plane, may be formed. Referring to FIGS. 9 and 10B, the cell unit 12 (FIG. 2D) as described above with reference to FIG. 2D may be inserted into the grid map 27′. Thus, the active fin lines 4 and the gate lines 7, as described above with reference to FIG. 3C, may be formed.

In an example, in the grid units 9 of the grid map 27′, the cell unit 12 (FIG. 2D) may be interposed between the overlapping grid units 30 overlapping the boundary portion BR of the different layout region 22. Thus, end portions of the active fin lines 4 and the gate lines 7 may overlap the different layout region 22.

With reference to FIGS. 9 and 10C, a unit cell, overlapping the different layout region 22 or not satisfying a minimum distance thereof from the different layout region 22 may be removed, in operation S130. For example, unit cells in the overlapping grid units 30 overlapping the boundary portion BR of the different layout region 22 may be removed. Thus, end portions of the active fin lines 4 and the gate lines 7 may not overlap the different layout region 22.

Subsequently, another example of a layout method will be described with reference to FIG. 9, and FIGS. 11A to 11D. FIGS. 11A to 11D are plan views illustrating an example of a semiconductor device layout method according to an example embodiment.

With reference to FIGS. 9 and 11A, a design rule may be determined in operation S105. The determination of the design rule may be identical to determining the design rule described above with reference to FIGS. 1 to 2D.

Circuit active fin lines 3 c and circuit gate lines 6 c may be formed in the layout region 20 using the same method as described above with reference to FIGS. 1 and 3A, in operation S110. Subsequently, an auxiliary gate layout 15 may be formed in the layout region 20. The auxiliary gate layout 15 may have a linear form extended in the second direction Y, and may have a width W in the first direction X that is greater than that of a single gate line 6 c. The auxiliary gate layout 15 may not overlap the circuit gate lines 6 c and the circuit active fin lines 3 c. The auxiliary gate layout 15 may be disposed to be adjacent to end portions of the circuit active fin lines 3 c while being parallel to the circuit gate lines 6 c. As illustrated in FIGS. 1 and 3A, the vacant region 24 in the layout region 20 may be identified in operation S15. A region in which the auxiliary gate layout 15 is located in the layout region 20 may be recognized as the vacant region 24, e.g., the auxiliary gate layout 15 may be a portion of the vacant region 24. For example, when identifying the vacant region 24, the auxiliary gate layout 15 may be regarded as not being present.

With reference to FIGS. 9 and 11B, a grid map 27 may be established in the vacant region 24 using the grid unit 9 in the same manner as the description of FIGS. 1 and 3B, in operation S120. In the stage in which the vacant region 24 is identified, as the auxiliary gate layout 15 is regarded in such a manner that there is no auxiliary gate layout, the grid map 27 may include grid units overlapping the auxiliary gate layout 15, e.g., the grid map 27 may be marked in the vacant region 24 regardless of the auxiliary gate layout 15 to provide a uniform grid that overlaps the auxiliary gate layout 15 and contacts the circuit gate lines 6 c and the circuit active fin lines 3 c.

With reference to FIGS. 9 and 11C, the cell unit 12 (see FIG. 2D) may be interposed between the grid units 9 of the grid map 27 in the same manner as the description of FIGS. 1 and 3C, in operation S125. Thus, the active fin lines 4 including the circuit active fin lines 3 c and the dummy active fin lines 3 d, as described above with reference to FIG. 3C, and the gate lines 7 including the circuit gate lines 6 c and the dummy gate lines 6 d may formed. The active fin lines 4 and the gate lines 7 as described above may include portions overlapping the auxiliary gate layout 15.

With reference to FIGS. 9 and 11D, a unit cell, overlapping a different layout region or not satisfying a minimum distance thereof from the different layout region may be removed, in operation S130.

The auxiliary gate layout 15 may be set as a layout region different from the layout region 20. Subsequently, unit cells in a grid unit 33, overlapping the auxiliary gate layout 15 and not satisfying a minimum distance thereof from the auxiliary gate layout 15, may be removed therefrom. Thus, the unit cells in contact with the auxiliary gate layout 15 may be all removed. Thus, the active fin lines 4 and the gate lines 7 may be formed to prevent a portion thereof overlapping the auxiliary gate layout 15 from occurring. Thus, active fin lines 4′ and gate lines 7′ spaced apart from the auxiliary gate layout 19 may be formed.

According to example embodiments, layout methods for the formation of active fin patterns and gate lines, and layouts formed by the layout methods may be provided. According to example embodiments, layout methods, in which a margin of a semiconductor process performed to form patterns in a circuit region and patterns in a dummy region may be improved, and layouts formed using the layout methods may be provided. According to example embodiments, layout methods, in which patterns formed in a dummy region may be formed more densely, and layouts fonned using the layout methods may be provided. According to example embodiments, layout methods, in which patterns formed in a dummy region are disposed at a required density, or a distance between patterns formed in a dummy region and patterns formed in a circuit region may be appropriate therefor, and layouts formed using the layout methods may be provided.

Layouts according to example embodiments may improve a process margin of a semiconductor process in which constituent elements, for example, active regions, active fin patterns, and gate lines, configuring a semiconductor device are formed. For example, in forming constituent elements of a semiconductor device according to an example embodiment, since a process margin may be improved in a photolithography process, an etching process, a planarizing process, e.g., a CMP, and the like, process defects may be reduced and productivity may be improved.

Hereinafter, a semiconductor device formed using layout methods according to example embodiments and layouts formed using the layout methods will be described.

A semiconductor device according to example embodiments will be described with reference to FIGS. 12 and 13. FIG. 12 is a conceptual view of a semiconductor device according to example embodiments, and FIG. 13 is a plan view illustrating an example of a semiconductor device according to an example embodiment.

First, referring to FIG. 12, a semiconductor device 1 according to example embodiments may include a first region A1, a second region A2, and a third region A3.

In an example, the first region A1 may be a region including patterns formed at a same pitch on a single plane. In an example, the first region A1 may be a region in which layouts formed using the layout formation method described above with reference to FIGS. 1 to 11D may be disposed. For example, the first region A1 may include a region corresponding to the layout region 20 described with reference to FIG. 3A.

In an example, the first region A1 may include patterns formed at a pitch different from a pitch of the second region A2 and the third region A3, on a single plane. In an example, the first region A1 may be an element region having a largest area within the semiconductor device, e.g., a semiconductor chip, the second region A2 may be a memory device region, e.g., static random access memory (SRAM) or the like, and the third region A3 may be an element region including an I/O device region.

The semiconductor device 1 according to example embodiments may include row patterns arranged on first virtual linear lines CL extended in the first direction X, and column patterns arranged on second virtual linear lines RL extended in the second direction Y, perpendicular to the first direction X. The first linear lines CL may refer to row lines, and the second linear lines RL may refer to column lines. The virtual row lines CL may be virtual lines illustrating that the row patterns may be arranged on a straight, direct line, and the virtual column lines RL may be virtual lines illustrating that the column patterns may be arranged on a straight, direct line.

In an example, the row patterns may include active fin patterns, and the column patterns may include gate patterns. In an example, the row patterns may be final active fin patterns in a semiconductor device provided by forming active fin lines using a layout configured of the active fin lines 4, as illustrated in FIG. 4A, and then, patterning the active fin lines 4 using a layout configured of the active layout pattern 50, as illustrated in FIG. 6A. In an example, the column patterns may be final gate lines provided by forming gate lines using a layout configured of the gate lines 7, as illustrated in FIG. 4B, and then, patterning the gate lines, using a layout configured of the gate layout pattern 60 as illustrated in FIG. 6B. Examples of the finally obtained active fin patterns and the finally obtained gate lines will be described with reference to FIGS. 12 and 13.

Referring to FIGS. 12 and 13, the semiconductor device 1 according to an example embodiment may include an active region AR, active fin patterns AFL formed on the active region AR and extended in the first direction X, and gate lines GL extended in the second direction Y perpendicular to the first direction X. The active fin patterns AFL may be arranged on the first virtual linear lines CL extended in the first direction X. The gate lines GL may be arranged on the second virtual linear lines RL extended in the second direction Y.

FIG. 14 is a cross-sectional view illustrating an example of patterns of the semiconductor device 1 according to an example embodiment. FIG. 14 is a cross-sectional view of regions taken along line I-I′ and line II-II′ of FIG. 13.

With reference to FIGS. 12 to 14, the active region AR may be disposed on a substrate SUB. The substrate SUB may be a semiconductor substrate formed of a semiconductor material, e.g., silicon or the like. The active fin patterns AFL may have a linear shape protruding from the active region AR and extended in the first direction X. The gate lines GL may be extended in a second direction Y perpendicular to the first direction X, and may overlap an upper surface and upper side surfaces of the active fin patterns AFL. The gate lines GL may be formed of a metal nitride and/or a conductive material, e.g., a metal or the like.

A first isolation region ISO1 defining the active region AR may be disposed on the substrate SUB. Second isolation regions ISO2 may be disposed on the active region AR. The second isolation regions ISO2 may be disposed on side surfaces of the active fin patterns AFL. Source/drain regions S/D may be disposed on the active fin patterns AFL adjacent to the gate lines GL. Gate dielectric portions Gox may be disposed on a bottom surface and a side surface of the gate lines GL. Gate capping patterns GC may be disposed on the gate lines GL. Gate spacers GS may be disposed on side surfaces of the gate lines GL. A transistor having a FinFET structure including the active fin patterns AFL, the gate dielectric portions Gox, the gate lines GL intersecting the active fin patterns AFL, and the source/drain regions S/D may be provided.

A semiconductor device according to an example embodiment will be described with reference to FIGS. 15 to 17B. In FIGS. 15 to 17B, FIG. 15 is a plan view illustrating a portion of the first region A1 described above with reference to FIG. 12, FIG. 16 is an enlarged plan view of a portion represented by “P” of FIG. 15, FIG. 17A is a plan view illustrating active fin patterns of FIG. 16, and FIG. 17B is a plan view illustrating gate lines of FIG. 16.

With reference to FIGS. 15 and 16, a first region A1′ of a semiconductor device may include a circuit region CA and a dummy region DA. In an example, the first region A1′ illustrated in FIG. 15 may be a portion of the first region A1 of the semiconductor device illustrated with reference to FIG. 12.

As illustrated in FIG. 16, a circuit active region 115 c may be disposed on the circuit region CA, and a plurality of dummy active regions 115 d may be disposed on the dummy region DA. In an example, in the case of the circuit active region 115 c, a plurality of circuit active regions may be disposed according to a circuit configuration.

The circuit active fin patterns 110 c may be disposed on the circuit active region 115 c. Dummy active fin patterns 110 d may be disposed on the plurality of dummy active regions 115 d. The circuit and dummy active fin patterns 110 c and 110 d may have a linear shape extended in the first direction X. Two end portions of the circuit active fin patterns 110 c may be aligned with side surfaces of the circuit active region 115 c, and two end portions of the dummy active fin patterns 110 d may be aligned with side surfaces of the plurality of dummy active regions 115 d.

Circuit gate lines 165 c may be disposed on the circuit region CA, and dummy gate lines 165 d may be disposed on the dummy region DA. The circuit and dummy gate lines 165 c and 165 d may have a linear shape extended in the second direction Y. A density at which the dummy gate lines 165 d are disposed may be higher than a layout density of the dummy active fin patterns 115 d. The circuit active fin patterns 110 c and the dummy active fin patterns 110 d may be arranged on the first virtual linear lines extended in the first direction X. For example, the circuit active fin patterns 110 c and the dummy active fin patterns 110 d may be disposed on the first region A1 (FIG. 12) described above with reference to FIG. 12, and may be arranged on the first virtual linear lines extended in the first direction X.

The circuit gate lines 165 c and the dummy gate lines 165 d may be arranged on the second virtual linear lines RL (FIG. 12) extended in the second direction Y. For example, the circuit gate lines 165 c and the dummy gate lines 165 d may be disposed on the first region A1 (FIG. 12) described above with reference to FIG. 12, and may be arranged on the second virtual linear lines RL (see FIG. 12) extended in the second direction Y.

Among the plurality of dummy active regions 115 d, a dummy active region disposed in the first direction X of the circuit active region 115 c and nearest the circuit active region 115 c may be referred to as a first-side dummy active region 115 d_1, and a dummy active region disposed in the second direction Y of the circuit active region 115 c and nearest the circuit active region 115 c may be referred to as a second-side dummy active region 115 d_2.

Dummy active fin patterns disposed on the first-side dummy active region 115 d_1 may be referred to as first-side dummy fin patterns 110 d_1, and dummy active fin patterns disposed on the second-side dummy active region 115 d_2 may be referred to as second-side dummy fin patterns 110 d_2. The circuit active fin patterns 110 c and the first-side dummy fin patterns 110 d_1 will be described below with reference to FIG. 17A.

As illustrated in FIG. 17A, the circuit active fin patterns 110 c and the first-side dummy fin patterns 110 d_1 may be formed at the same pitch. The pitch may indicate a distance between an edge of one pattern and an edge of another pattern corresponding thereto and adjacent thereto. For example, the circuit active fin patterns 110 c and the first-side dummy fin patterns 110 d_1 may have the same first width W1 and may be spaced apart from each other at a first distance S1, and a sum of the first width W1 and the first distance S1 may be a first pitch P1.

End portions Ca_E of the circuit active fin patterns 110 c may oppose end portions Da_E of the first-side dummy fin patterns 110 d_1. The circuit active fin patterns 110 c and the first-side dummy fin patterns 110 d_1 may be aligned with each other. The first-side dummy fin patterns 110 d_1 may be disposed on virtual linear lines extended from the circuit active fin patterns 110 c. Sides Ca_S of the circuit active fin patterns 110 c may be aligned with sides Da_S of the first-side dummy active fin patterns 110 d_1. A distance L1 between the circuit activity pin patterns 110 c and the first-side dummy active patterns 110 d_1 may be substantially identical to a distance between the circuit active region 115 c and the first-side dummy active region 115 d_1.

The circuit gate lines 165 c and the dummy gate lines 165 d, of which end portions oppose each other, will be described below with reference to FIG. 17B.

Referring to FIG. 17B, the gate circuit lines 165 c and the dummy gate lines 165 d may be formed at the same pitch. For example, the circuit gate lines 165 c and the dummy gate lines 165 d may have the same second width W2 and may be spaced apart from each other at a second distance S2, and a sum of the second width W2 and the second distance S2 may be a second pitch P2. End portions Cg_E of the circuit gate lines 165 c may oppose end portions Dg_E of the dummy gate lines 165 d.

The circuit gate lines 165 c and the dummy gate lines 165 d may be aligned with each other. The dummy gate lines 165 d may be disposed on virtual linear lines extended from the gate lines 165 c. Sides Cg_S of the circuit gate lines 165 c may be aligned with sides Dg_S of the dummy gate lines 165 d. A distance L2 between the circuit gate lines 165 c and the dummy gate lines 165 d may be less than the distance L1 (see FIG. 17A) between the circuit active fin patterns 110 c and the first-side dummy fin patterns 110 d_1.

An example of a semiconductor device, including the plurality of dummy active regions 115 d, the dummy active fin patterns 110 d, the circuit active region 115 c, the circuit active fin patterns 110 c, the dummy gate lines 165 d, and the circuit gate lines 165 c described above with reference to FIGS. 16 to 17B, will be described below with reference to FIGS. 18A and 18B.

FIG. 18A is a cross-sectional view illustrating a region taken along line III-III′ of FIG. 16, and FIG. 18B is a cross-sectional view illustrating a region taken along line IV-IV′ of FIG. 16.

With reference to FIGS. 15 to 18B, the plurality of dummy active regions 115 d and the circuit active region 115 c may be disposed on a substrate 105. The substrate 105 may be a semiconductor substrate.

The plurality of dummy active regions 115 d and the circuit active region 115 c may be defined by a first isolation region 135 disposed on the substrate 105. The first isolation region 135 may be formed of an insulating material such as silicon oxide or the like.

The plurality of dummy active fin patterns 110 d may protrude from the plurality of dummy active regions 115 d, and the plurality of circuit active fin patterns 110 c may protrude from the circuit active region 115 c.

A second isolation region 121 may be disposed on sides of the dummy active fin patterns 110 d and the circuit active fin patterns 110 c. The second isolation region 121 may be formed of an insulating material such as silicon oxide or the like. The second isolation region 121 may have an upper surface lower than upper surfaces of the dummy active fin patterns 110 d and the circuit active fin patterns 110 c.

The dummy gate lines 165 d may intersect the dummy active fin patterns 110 d on the dummy active regions 115 d, and the circuit gate lines 165 c may intersect the circuit active fin patterns 110 d on the circuit active region 115 c. The gate circuit lines 165 c and the dummy gate lines 165 d may be continuously arranged while having the same width, in the first direction X, but are not limited thereto. For example, in the circuit gate lines 165 c and the dummy gate lines 165 d, an auxiliary gate pattern may be disposed between circuit gate lines and dummy gate lines adjacent to each other. The auxiliary gate pattern will be described below with reference to FIGS. 19 and 20. FIG. 19 is a plan view of a semiconductor device according to an example embodiment, and FIG. 20 is a cross-sectional view of a region taken along line V-V′ of FIG. 19.

With reference to FIGS. 19 and 20, in the circuit gate lines 165 c and the dummy gate lines 165 d, an auxiliary gate pattern 180 may be disposed between a circuit gate line 165 c and a dummy gate line 165 d adjacent to each other. The auxiliary gate pattern 180 may be parallel to the circuit and dummy gate lines 165 c and 165 d.

The auxiliary gate pattern 180 may have a width greater than that of the circuit and dummy gate lines 165 c and 165 d which may be formed to have the same width. The auxiliary gate pattern 180 is formed to have a width greater than other patterns adjacent thereto, for example, the circuit gate lines 165 c, and may thus serve as a structure preventing the circuit gate lines 165 c from collapsing or being transformed.

An example of disposition of constituent elements configuring a semiconductor device according to an example embodiment will be described below with reference to FIG. 21. FIG. 21 is a conceptual diagram illustrating a layout density of a semiconductor device according to example embodiments.

Referring to FIG. 21, the circuit region CA may include a first circuit region C_1 and a second circuit region C_2, and the dummy region DA may include a first dummy region D_1 and a second dummy region D_2. The first circuit region C_1 and the first dummy region D_1 are adjacent to each other or may face each other, and the second circuit region C_2 may be spaced apart from the first dummy region D_1. The first circuit region C_1 and the first dummy region D_1 may be referred to as an adjacent circuit region and an adjacent dummy region, respectively.

In an example, the first circuit region, for example, an adjacent circuit region C_1, may be disposed between the second circuit region C_2 and the first dummy region, for example, an adjacent dummy region D_1. The adjacent dummy region D_1 may be disposed between the adjacent circuit region C_1 and the second dummy region D_2.

Circuit patterns may be disposed in the circuit region CA, and dummy patterns may be disposed in the dummy region DA. The dummy patterns of the dummy region DA may be disposed in consideration of a layout density of the circuit patterns of the circuit region CA disposed on a single plane or a single layer. For example, the dummy active regions 115 d (see FIG. 16) of the dummy region DA may be disposed in consideration of a layout density of the circuit active region 115C (see FIG. 16) of the circuit region CA disposed on a single plane. The dummy active fin patterns 110 d (see FIG. 16) of the dummy region DA may be disposed in consideration of a layout density of the circuit active fin patterns 110C (see FIG. 16) of the circuit region CA disposed on a single plane. The dummy gate lines 165 d (see FIG. 16) of the dummy region DA may be disposed in consideration of a layout density of the circuit gate lines 165C (see FIG. 16) of the circuit region CA disposed on a single plane.

In an example, the layout density may be understood as a density with respect to a flat area.

In an example, the adjacent circuit region C_1 of the circuit region CA may be divided into two or more regions in which circuit patterns may be disposed at different densities. For example, the adjacent circuit region C_1 may include a high-density circuit region CH in which circuit patterns may be disposed at a higher density than an average density of circuit patterns in the entirety of the circuit region CA, a low-density circuit region CL in which circuit patterns may be disposed at a lower density than an average density of circuit patterns in the entirety of the circuit region CA, and a medium-density circuit region CM in which circuit patterns may be disposed at an average density corresponding to an average density of circuit patterns of the circuit region CA. Thus, a layout density of circuit patterns of the high-density circuit region CH may be higher than a layout density of circuit patterns of the medium-density circuit region CM and the low-density circuit region CL, and a layout density of circuit patterns of the medium-density circuit region CM may be a density between the layout density of circuit patterns of the high-density circuit region CH and the layout density of circuit patterns of the low-density circuit region CL.

The adjacent dummy region D_1 of the dummy region DA may include a high density dummy region DH facing or adjacent to the low-density circuit region CL, a low-density dummy region DL facing or adjacent to the high-density circuit region CH, and a medium-density dummy region DM facing or adjacent to the medium-density circuit region CM. The high-density dummy region DH may be a region in which dummy patterns may be disposed at a higher density than an average density of circuit patterns of the circuit region CA, and the low-density dummy region DL may be a region in which dummy patterns may be disposed at a lower density than an average density of circuit patterns of the circuit region CA. The medium-density dummy region DM may be a region in which dummy patterns may be disposed at an average density corresponding to an average density of circuit patterns of the circuit region CA.

In the dummy region DA, the second dummy region D_2 spaced apart from the circuit region CA by the adjacent dummy region D_1 may include the medium-density dummy regions DM disposed therein.

The adjacent circuit region C_1 of the circuit region CA may be divided into two or more regions in which circuit patterns may be disposed at different densities. For example, as illustrated in FIG. 21, the adjacent circuit region C_1 may be divided into three regions CH, CL and CM in which circuit patterns may be disposed at different densities, but is not limited thereto. For example, the adjacent circuit region C_1 may be divided into two regions in which circuit patterns may be disposed at different densities, for example, the high-density circuit region CH and the low-density circuit region CL.

An example of layout of constituent elements configuring a semiconductor device according to an example embodiment will be described below with reference to FIGS. 22 to 26. FIG. 22 is a conceptual view illustrating a layout of constituent elements configuring a semiconductor device according to an example embodiment, FIG. 23 is a plan view illustrating an example of a layout of constituent elements configuring a semiconductor device according to an example embodiment, FIG. 24 is a plan view illustrating another example of a layout of constituent elements configuring a semiconductor device according to an example embodiment, FIG. 25 is a plan view illustrating another example of a layout of constituent elements configuring a semiconductor device according to an example embodiment, and FIG. 26 is a plan view illustrating another example of a layout of constituent elements configuring a semiconductor device according to an example embodiment.

First, with reference to FIG. 22, a semiconductor device according to an example embodiment will be described below.

Referring to FIG. 22, a semiconductor device according to an example embodiment may include a circuit region CA and a dummy region DA.

The circuit region CA may include a first circuit region and a second circuit region C_2. The first circuit region may be disposed between the dummy region D2 and the second circuit region C_2, and the second circuit region C_2 may be spaced apart from the dummy region DA.

In an example, the first circuit region of the circuit region CA may include a first adjacent circuit region C_1 a facing or adjacent to one side of the dummy region DA and a second adjacent circuit region C-1 b facing or adjacent to another side of the dummy region DA. The dummy region DA may be disposed between the first adjacent circuit region C_1 a and the second adjacent circuit region C_1 b. The dummy region DA may include a first dummy region and a second dummy region D_2. The first dummy region may be disposed between the second dummy region D_2 and the circuit region CA.

In an example, the first dummy region of the dummy region DA may include a first adjacent dummy region D_1 a facing or adjacent to the first adjacent circuit region C_1 a and a second adjacent dummy region D_1 b facing or adjacent to the second adjacent circuit region C_1 b. A layout density of dummy patterns of the second dummy region D_2 may be equal to or similar to an average layout density of circuit patterns of the circuit region CA.

In an example, an average layout density of the dummy patterns and the circuit patterns of the first adjacent dummy region D_1 a and the first adjacent circuit region C_1 a may be equal to or similar to an average density of circuit patterns of the circuit region CA. Thus, a layout density of dummy patterns of the first adjacent dummy region D_1 a may be determined depending on a layout density of circuit patterns of the first adjacent circuit region C_1 a, and a layout density of dummy patterns of the second adjacent dummy region D_1 b may be determined depending on a layout density of circuit patterns of the second adjacent circuit region C_1 b. For example, when an average layout density of the circuit patterns of the first adjacent circuit region C_1 a is higher than an average density of circuit patterns of the circuit region CA, an average layout density of the first adjacent dummy region D_1 a may be lower than an average density of circuit patterns of the circuit region CA. In a manner different therefrom, for example, when an average layout density of the circuit patterns of the first adjacent circuit region C_1 a is lower than an average density of circuit patterns of the circuit region CA, an average layout density of the dummy patterns of the first adjacent dummy region D_1 a may be higher than an average density of circuit patterns of the circuit region CA. In a manner different therefrom, for example, when an average layout density of the circuit patterns of the first adjacent circuit region C_1 a is equal or similar to an average density of circuit patterns of the circuit region CA, an average layout density of the dummy patterns of the first adjacent dummy region D_1 a may be equal or similar to an average density of circuit patterns of the circuit region CA. A relationship between an average layout density of circuit patterns of the first adjacent circuit region C_1 a and a layout density of dummy patterns of the first adjacent dummy region D_1 a may be identically applied to a relationship between a layout density of circuit patterns of the second adjacent circuit region C_1 b and a layout density of dummy patterns of the second adjacent dummy region D_1 b.

In an example, the first adjacent circuit region C_1 a may include a plurality of portions, and the first adjacent dummy region D_1 a may include a plurality of portions facing the plurality of portions of the first adjacent circuit region C_1 a.

In an example, a layout density of dummy patterns of the plurality of portions of the first adjacent dummy region D_1 a may be changed according to a layout density of circuit patterns of the plurality of portions of the first adjacent circuit region C_1 a. For example, the first adjacent circuit region C_1 a may include first to sixth circuit portions C1, C2, C3, C4, C5, and C6, the first adjacent dummy region D_1 a may include first to sixth dummy portions D1, D2, D3, D4, D5, and D6 facing the first to sixth circuit portions C1, C2, C3, C4, C5, and C6. For example, when any one of the first to sixth circuit portions C1, C2, C3, C4, C5, and C6 of the first adjacent circuit region C_1 a is a high-density adjacent circuit region, any one of first to sixth dummy portions D1, D2, D3, D4, D5, and D6 of the first adjacent dummy region D_1 a, facing the high-density adjacent circuit region, may be a low-density adjacent dummy region. In a manner different therefrom, for example, when any one of the first to sixth circuit portions C1, C2, C3, C4, C5, and C6 of the first adjacent circuit region C_1 a is a low-density adjacent circuit region, any one of the first to sixth dummy portions D1, D2, D3, D4, D5, and D6 of the first adjacent dummy region D_1 a, facing the low-density adjacent circuit region, may be a high-density adjacent dummy region.

In the same manner as the first adjacent circuit region C 1 a and the first adjacent dummy region D_1 a, the second adjacent circuit region C_1 b may include first to sixth circuit portions C1′, C2′, C3′, C4′, C5′, and C6′, and the second adjacent dummy region D_1 b may include first to sixth dummy portions D1′, D2′, D3′, D4′, D5′, and D6′. A relationship between the first to sixth circuit portions C1′, C2′, C3′, C4′, C5′, and C6′ of the second adjacent circuit region C_1 b and the first to sixth dummy portions D1′, D2′, D3′, D4′, D5′, and D6′ of the second adjacent dummy region D_1 b may be identical to a relationship between the first to sixth circuit portions C1, C2, C3, C4, C5, and C6 of the first adjacent circuit region C_1 a and the first to sixth dummy portions D1, D2, D3, D4, D5′, and D6 of the first adjacent dummy region D_1 a.

Referring to FIGS. 22 and 23, an example of patterns of the circuit region CA and the dummy region DA will be described below.

Referring to FIGS. 22 and 23, circuit active regions 215 c and circuit active fin patterns 210 c may be disposed in the circuit region CA. Dummy active regions 215 d and dummy active fin patterns 210 d may be disposed in the dummy region DA. The circuit active fin patterns 210 c may be disposed on the circuit active regions 215 c, and the dummy active fin patterns 210 d may be disposed on the dummy active regions 215 d.

In an example, the circuit active regions 215 c may correspond to the circuit active region 115 c described above with reference to FIG. 16, the dummy active regions 215 d may correspond to the second-side dummy active region 115 d_2 described above with reference to FIG. 16, the circuit active fin patterns 210 c may correspond to the circuit active fin patterns 110 c described above with reference to FIG. 16, and the dummy active fin patterns 210 d may correspond to the second-side dummy fin patterns 110 d_2 described above with reference to FIG. 16. Thus, a description of the circuit active regions 215 c, the dummy active regions 215 d, the circuit active fin patterns 210 c and the dummy active fin patterns 210 c may be identically applied to the circuit active region 115 c, the second-side dummy active region 115 d_2, the circuit active fin patterns 110 c and the second-side dummy fin patterns 110 d_2. The first, second, fourth, fifth and sixth portions C1, C2, C4, C5, and C6 of the first adjacent circuit region C_1 a may be a high density circuit region CH in which circuit patterns, for example, the circuit active regions 215 c or the circuit active fin patterns 210 c, have a relatively high density, and the third portion C3 of the first adjacent circuit region C_1 a may be a low density circuit region CL in which circuit patterns, for example, the circuit active regions 215 c or the circuit active fin patterns 210 c, have a relatively low density. Thus, a layout density of the circuit active fin patterns 210 c in the first to sixth portions C1 to C6 of the first adjacent circuit region C_1 a may be higher than an average layout density of the circuit active fin patterns 210 c in the circuit region CA. In the first adjacent circuit region C_1 a, the first, second, fourth, fifth and sixth portions C1, C2, C4, C5, and C6 may be portions in which the layout number of the circuit active fin patterns 210 c is increased, and the third portion C3 may be a portion in which the layout number of the circuit active fin patterns 210 c is relatively reduced.

An area density of the circuit active region 215 c in the first to sixth portions C1 to C6 of the first adjacent circuit region C_1 a may be higher than an average area density of the circuit active region 215 c in the circuit region CA.

Among dummy active fin patterns 210 d disposed in the dummy region DA, a density of the dummy active fin patterns 210 d or the dummy active region 215 d disposed in the first to sixth dummy portions D1, D2, D3, D4, D5, and D6 of the first adjacent dummy region D_1 a may be lower than an average density of the circuit active fin patterns 210 c in the circuit region CA. For example, the dummy active region 215 d disposed in the first to sixth dummy portions D1, D2, D3, D4, D5, and D6 of the first adjacent dummy region D_1 a may be disposed in a linear shape having a predetermined width, and the dummy active fin patterns 210 d disposed on the dummy active region 215 d may be disposed in a predetermined number. By reducing a width of the dummy active region 215 d to decrease a flat area of the dummy active area 215 d, a density of the dummy active region 215 d in the first adjacent dummy region D_1 a may be reduced, and a density of the dummy active fin patterns 210 d disposed on the dummy active region 215 d of which the density has been reduced as described above may also be reduced.

The third and fifth portions C3 and C5 of the second adjacent circuit region C_1 b may be a high density circuit region CH in which a density of the circuit active regions 215 c or the circuit active fin patterns 210 c is relatively high, and the first, second, fourth and sixth portions C1, C2, C4 and C6 of the second adjacent circuit region C_1 b may be a low density circuit region CL in which a density of the circuit active regions 215 c or the circuit active fin patterns 210 c is relatively low. Thus, a layout density of the circuit active fin patterns 210 c in the first to sixth portions C1′, C2′, C3′, C4′, C5′, and C6′ of the second adjacent circuit region C_1 b may be lower than an average layout density of the circuit active fin patterns 210 c in the circuit region CA. An area density of the circuit active region 215 c in the first to sixth portions C1′ to C6′ of the second adjacent circuit region C_2 a may be lower than an average area density of the circuit active region 215 c in the circuit region CA.

A density of the dummy active fin patterns 210 d or the dummy active region 215 d disposed in the first to sixth dummy portions D1′, D2′, D3′, D4′, D5′, and D6′ of the second adjacent dummy region D_1 b may be higher than an average density of the circuit active fin patterns 210 c of the circuit region CA. For example, the dummy active region 215 d disposed in the first to sixth dummy portions D1′ to D6′ of the second adjacent dummy region D_1 b may be disposed in a linear shape having a predetermined width, and the dummy active fin patterns 210 d disposed on the dummy active region 215 d may be disposed in a predetermined number. By increasing a width of the dummy active region 215 d to increase a flat area of the dummy active area 215 d, a density of the dummy active region 215 d in the second adjacent dummy region D_1 b may be increased, and a density of the dummy active fin patterns 210 d disposed on the dummy active region 215 d of which the density has been increased as described above may also be increased.

Dummy patterns disposed in the second dummy region D_2, for example, a density of the dummy active region 215 d or the dummy active fin patterns 210 d may be equal or similar to an average density of circuit patterns of the circuit region CA, for example, an average density of the circuit active fin patterns 210 c or the circuit active region 215 c.

Dummy patterns disposed in the second dummy region D_2, for example, a density of the dummy active region 215 d or the dummy active fin patterns 210 d may be lower than a density of dummy patterns in the first adjacent dummy region D_1 a, for example, the dummy active region 215 d or the dummy active fin patterns 210 d, and may be higher than a density of dummy patterns in the second adjacent dummy region D_1 b, for example, a density of the dummy active region 215 d or the dummy active fin patterns 215 d.

Next, referring to FIGS. 22 and 24, an example of patterns of the circuit region CA and the dummy region DA will be described below.

With reference to FIGS. 22 and 24, the circuit active regions 215 c and the circuit active fin patterns 210 c may be disposed in the circuit region CA in a manner similar to that of the illustration of FIG. 23. The dummy active regions 215 d and the dummy active fin patterns 210 d may be disposed in the dummy region DA.

The circuit region CA may include the first adjacent circuit region C_1 a and the second adjacent circuit region C_1 b, identical to the description with reference to FIG. 23.

The first, second, fourth, fifth and sixth portions C1, C2, C4, C5, and C6 of the first adjacent circuit region C_1 a may be a high density circuit region CH in which circuit patterns, for example, the circuit active regions 215 c or the circuit active fin patterns 210 c, have a relatively high density, and the first, second, fourth, fifth and sixth portions D1, D2, D4, D5, and D6 of the first adjacent dummy region D_1 a facing the first, second, fourth, fifth and sixth portions C1, C2, C4, C5, and C6 of the first adjacent circuit region C_1 a may be a low density circuit dummy region DL in which dummy patterns, for example, the dummy active regions 215 d or the dummy active fin patterns 210 c, have a relatively low density.

The third portion C3 of the first adjacent circuit region C_1 a may be a low density circuit region CL in which circuit patterns, for example, the circuit active regions 215 c or the circuit active fin patterns 210 c, have a relatively low density, and the third portion D3 of the first adjacent dummy region D_1 a facing the third portion C3 of the first adjacent circuit region C_1 a may be a high density dummy region DH in which dummy patterns, for example, the dummy active regions 215 d or the dummy active fin patterns 210 d, have a relatively high density.

The third and fifth portions C3′ and C5′ of the second adjacent circuit region C_1 b may be a high density circuit region CH in which the circuit active regions 215 c or the circuit active fin patterns 210 c have a relatively high density, and the third and fifth portions C3′ and C5′ of the second adjacent dummy region D_1 b facing the third and fifth portions C3′ and C5′ of the second adjacent circuit region C_1 b may be a low density dummy region DL in which dummy patterns, for example, the dummy active regions 215 d or the dummy active fin patterns 210 d, have a relatively low density.

In a manner similar to FIG. 23, dummy patterns disposed in the second dummy region D_2, for example, a density of the dummy active region 215 d or the dummy active fin patterns 210 d may be equal or similar to an average density of circuit patterns of the circuit region CA, for example, the circuit active region 215 c or the circuit active fin patterns 210 c.

In an example, the dummy active regions 215 d in the first and second adjacent dummy regions D_1 a and D_1 b may have a relatively great width in the high density dummy region DH rather than in the low density dummy region DL.

In the dummy active regions 215 d, a portion thereof having a relatively large width, for example, the number of the dummy active fin patterns 210 d disposed in the high density dummy region DH may be higher than the number of portions thereof having a relatively small width, for example, the number of the dummy active fin patterns 210 d disposed in the low density dummy region DL.

In an example, the dummy active regions 215 d in the first and second adjacent dummy regions D_1 a and D_1 b may have a portion having an increased width while protruding in any single direction. As described above, the portion of the dummy active regions 215 d having an increased width may become the high density dummy region DH.

In an example, the dummy active regions 215 d in the first and second adjacent dummy regions D_1 a and D_1 b and the circuit active regions 215 c in the first and second adjacent circuit regions C_1 a and C_1 b may protrude in a single direction to have an increased width, but are not limited thereto. For example, as illustrated in FIG. 25, the circuit active region 215 c of the first adjacent circuit region C_1 a and the dummy active region 215 d of the first adjacent dummy region D_1 a may have portions protruding in different directions. As illustrated in FIG. 25, the circuit active region 215 c of the first adjacent circuit region C_1 a may have a portion protruding toward the low density dummy region DL of the first adjacent dummy region D_1 a, and the dummy active region 215 d of the first adjacent dummy region D_1 a may have a portion protruding toward the low density circuit region CL of the first adjacent circuit region C_1 a.

In an example, the dummy active regions 215 d in the first and second adjacent dummy regions D_1 a and D_1 b and the circuit active regions 215 c in the first and second adjacent circuit regions C_1 a and C_1 b may protrude from any one side to have an increased width, but are not limited thereto. For example, as illustrated in FIG. 26, the dummy active region 215 d of the first adjacent dummy region D_1 a may protrude from two sides to have a portion in which a width thereof is increased.

FIG. 27 is a plan view of a semiconductor device according to an example embodiment. FIG. 27 is a plan view illustrating portions of the first region A1 and the second region A2 described above with respect to FIG. 12.

Referring to FIGS. 12 and 27, a semiconductor device may include the first region A1 and the second region A2 as illustrated in FIG. 12.

On a circuit region of the first region A1, a first circuit active region 115 c, first circuit active fin patterns 110 c disposed on the first circuit active region 115 c and extended in a first direction X, and first circuit gate lines 165 c intersecting the first circuit active fin patterns 110 c, while being extended in a second direction Y perpendicular to the first direction X, may be disposed.

On a dummy region of the first region A1, dummy active regions 115 d, dummy active fin patterns 110 d disposed on the dummy active regions 115 d, and dummy gate lines 165 d spaced apart from the first circuit gate lines 165 c, may be disposed.

On the second region A2, a second circuit active region 116, second circuit active fin patterns 111 disposed on the second circuit active region 116 and intersecting the second circuit active region 116, and second circuit gate lines 116 disposed on the second circuit active region 116 and intersecting the second circuit active fin patterns 116, may be disposed. The second circuit active fin patterns 111 may have a linear shape extended in the first direction X. The second circuit gate lines 166 may have a linear shape extended in the second direction Y.

In an example, the second circuit active fin patterns 111 may be disposed at a pitch different from pitches of the first circuit active fin patterns 110 c and the dummy active fin patterns 110 d. For example, the first circuit active fin patterns 110 c and the dummy active fin patterns 110 d may be disposed at a first pitch P1, and the second circuit active fin patterns 111 may be disposed at a third pitch P3, less than the first pitch P1.

In an example, the second circuit gate lines 166 may be disposed at a pitch different from a pitch of the first circuit gate lines 165 c and the dummy gate lines 165 d. For example, the first circuit gate lines 165 c and the dummy gate lines 165 d may be disposed at a second pitch P2, while the second circuit gate lines 166 may be disposed at a fourth pitch P4, less than the second pitch P2.

In an example, the second circuit active fin patterns 111 may not be aligned with the dummy active fin patterns 110 d on a virtual straight line. As an example, the second circuit gate lines 166 may not be aligned with the dummy gate lines 165 d on a virtual straight line.

FIG. 28 is a plan view of a semiconductor device according to an example embodiment. FIG. 28 is a plan view illustrating portions of the first region A1 and the third region A3 described above with respect to FIG. 12.

Referring to FIGS. 12 and 28, a semiconductor device may include the first region A1 and the third region A3 as illustrated in FIG. 12. On a dummy region of the first region A1, dummy active regions 115 d, dummy active fin patterns 110 d disposed on the dummy active regions 115 d, and dummy gate lines 165 d spaced apart from the first circuit gate lines 165 c, may be disposed.

On the third region A3, a third circuit active region 117, a third circuit active fin pattern 112 disposed on the third circuit active region 117 and intersecting the third circuit active region 117, and third circuit gate lines 167 disposed on the third circuit active region 117 and intersecting the third circuit active fin pattern 112, may be disposed. The third circuit active fin pattern 112 may have a linear shape extended in the first direction X. The third circuit gate lines 167 may have a linear shape extended in the second direction Y.

In an example, the third circuit gate lines 167 may be formed at a pitch different from a pitch of the first dummy gate lines 165 d. For example, the third circuit gate lines 167 may have a width greater than the first dummy gate lines 165 d. A distance between the third circuit gate lines 167 may be greater than a distance between the first dummy gate lines 165 d.

In an example, the third circuit active fin pattern 112 may have a width different from that of the dummy active fin pattern 110 d, for example, may have a greater width, but is not limited thereto. For example, the third circuit active fin pattern 112 may have the same width as that of the dummy active fin pattern 110 d.

In an example, the third circuit active fin pattern 112 may not be aligned with the dummy active fin pattern 110 d on a virtual straight line. For example, the third circuit gate lines 167 may not be aligned with the dummy gate lines 165 d on a virtual straight line.

A semiconductor device according to an example embodiment is described using patterns configuring transistors having a FinFET structure as described above with reference to FIGS. 13 and 14, for example, using the active region AR, the active fin patterns AFL, and the gate lines GL, but is not limited thereto. For example, a semiconductor device according to an example embodiment may be configured of patterns of transistors having a gate-all-around (GAA)structure. The patterns of the transistor having such a GAA structure will be described below with reference to FIG. 29. FIG. 29 is a cross-sectional view illustrating an example of patterns configuring a semiconductor device according to an example embodiment. In FIG. 29, a portion represented by A-A′ may be a cross section to be perpendicular to a portion represented by B-B′. For example, in FIG. 29, a portion represented by B-B′ may be a cross section obtained by cutting a middle portion of a portion represented by A-A′.

With reference to FIG. 29, a first isolation region ISO1′ defining an active region AR′ may be disposed on a substrate SUB. The substrate SUB may be a semiconductor substrate.

Active fin patterns AFL′ may be disposed on the active region AR′. A second isolation region ISO2′ may be disposed on sides of the active fin patterns AFL′.

Gate lines GL′ intersecting the active fin patterns AFL′ may be disposed. Source/drain regions S/D′ may be disposed on the active fin patterns AFL′ adjacent to the gate lines GL′. The source/drain regions S/D′ may protrude upwardly from the active fin patterns AFL′.

Channel semiconductor layers CS disposed between the source/drain regions S/D′ and connected thereto may be disposed. The channel semiconductor layers CS may be disposed on the active fin patterns AFL′ and may be spaced apart therefrom. The gate lines GL′ may be disposed to surround the channel semiconductor layers CS while intersecting the channel semiconductor layers CS. Thus, a transistor having a gate all around (GAA) structure may be provided.

In an example, the gate lines GL′, the active fin patterns AFL′, and the active region AR′ described with reference to FIG. 29 may replace the gate lines, the active fin patterns, and the active region described above with reference to FIGS. 15 to 28.

Gate capping patterns GC may be disposed on the gate lines GL, and insulating spacers GS' may be disposed on sides of the gate lines GL. In addition, an insulating layer IL may be disposed on the first isolation region ISO1′.

Next, an example of a method of manufacturing a semiconductor device according to an example embodiment will be described with reference to FIGS. 30 to 35B.

In FIGS. 30 to 35B, FIGS. 30 and 32 are plan views illustrating an example of a method of manufacturing a semiconductor device according to an example embodiment, and FIGS. 31A, 31B, 33A, 33B, 34A, 34B, 35A and 35B are cross-sectional views illustrating an example of a method of manufacturing a semiconductor device according to an example embodiment. In FIGS. 31A, 31B, 33A, 33B, 34A, 34B, 35A, and 35B, FIGS. 31A, 33A, 34A and 35A are cross-sectional views illustrating a region taken along line III-III′ of FIG. 16, and FIGS. 31B, 33B, 34B, and 35B are cross-sectional views illustrating a region taken along line IV-IV′ of FIG. 16.

With reference to FIGS. 30, 31A and 31B, active fin lines 110 may be formed on a substrate 105. The substrate 105 may be a semiconductor substrate. The active fin lines 110 may be extended in a first direction X while being parallel to each other.

In an example, the active fin lines 110 may be formed using the active fin lines 4 described above with reference to FIG. 4A.

With reference to FIGS. 31, 33A and 33B, active regions may be formed on the substrate 105. The active regions may include circuit active regions 115 c and dummy active regions 115 d.

The formation of the active regions 115 c and 115 d may include forming a first insulating layer 120 on the substrate 105 including the active fin lines 110, forming a mask 125 on the first insulating layer 120, and forming a deep trench 130 by etching the first insulating layer 120 and the substrate 105 using the mask 125. The active regions 115 c and 115 d may be defined by the deep trench 130. The first insulating layer 120 may be formed of an insulating material such as silicon oxide or the like.

The active regions 115 c and 115 d may be formed using the active layout patterns 50 described above with reference to FIG. 6A. A flat shape of the active regions 115 c and 115 d may correspond to a flat shape of the active layout patterns 50 described above with reference to FIG. 6A.

With reference to FIGS. 34A and 34B, a second insulating layer filling the deep trench 130 may be formed on the substrate 105 having the deep trench 130, the second insulating may be planarized, the mask 125 may be removed, and the second insulating layer and the first insulating layer 120 (FIGS. 33A and 33B) may be etched back, thereby forming a first isolation region 135 and a second isolation region 121. The first isolation region 135 may be formed by etching the second insulating layer, and the second isolation region 121 may be formed by etching the first insulating layer 120 (see FIGS. 33A and 33B).

The first isolation region 135 may define the active regions 115 c and 115 d, and the second isolation region 121 may be formed on sides of the active fin patterns 110 c and 110 d.

A level of upper surfaces of the active fin patterns 110 c and 110 d may be higher than a level of upper surfaces of the first and second isolation regions 135 and 121. Thus, side surfaces and upper surfaces of upper portions of the active fin patterns 110 c and 110 d may be exposed.

Referring to FIGS. 16, 35A and 35B, gate lines 165 c and 165 d may be formed on the substrate having the first and second isolation regions 135 and 121.

In an example, the formation of the gate lines 165 c and 165 d may include forming lines corresponding to the gate lines 7 described above with reference to FIG. 4B on the substrate having the active fin patterns 110 c and 110 d, and etching a portion of the lines using the gate layout pattern 60 described above with reference to FIG. 6B. Thus, the gate lines 165 c and 165 d may have a shape similar to that of the gate lines 165 c and 165 d described above with reference to FIG. 16.

In an example, the formation of the gate lines 165 c and 165 d may include forming insulating patterns 150 having gate trenches on the substrate having the first and second isolation regions 135 and 121, forming gate spacers 155 on sides of the insulating patterns 150, sequentially forming a gate dielectric portion 160 and a conducive material layer, planarizing and etching back the conductive material layer to partially fill the gate trench to form the gate lines 165 c and 165 d, and forming gate capping patterns 170 on the gate lines 165 c and 165 d.

As set forth above, according to example embodiments, a layout method for the formation of active fin patterns and gate lines may be provided. According to example embodiments, a layout method, in which a margin of a semiconductor process performed to form patterns in a circuit region and patterns in a dummy region may be improved, may be provided. According to example embodiments, a layout method, in which patterns formed in a dummy region may be formed more densely, may be provided. A layout method, in which patterns formed in a dummy region are disposed at a required density, or a distance between patterns formed in a dummy region and patterns formed in a circuit region may be appropriate therefor, may be provided. According to example embodiments, a semiconductor device manufactured using the layout method may be provided.

Example embodiments have been disclosed herein, and although specific terms are employed, they are used and are to be interpreted in a generic and descriptive sense only and not for purpose of limitation. In some instances, as would be apparent to one of ordinary skill in the art as of the filing of the present application, features, characteristics, and/or elements described in connection with a particular embodiment may be used singly or in combination with features, characteristics, and/or elements described in connection with other embodiments unless otherwise specifically indicated. Accordingly, it will be understood by those of skill in the art that various changes in form and details may be made without departing from the spirit and scope of the present invention as set forth in the following claims. 

1. A layout method, the method comprising: forming circuit active fin lines and circuit gate lines to intersect the circuit active fin lines in a layout region; identifying a vacant region in the layout region; setting a grid map in the vacant region using a grid unit; and forming dummy active fin lines and dummy gate lines within the grid map using a cell unit, wherein the grid unit has a quadrangular shape having first and second sides opposing each other and third and fourth sides opposing each other, and wherein the cell unit includes an active fin unit connecting middle portions of the first and second sides of the grid unit to each other, and a gate unit connecting middle portions of the third and fourth sides of the grid unit to each other and intersecting the active fin unit.
 2. The layout method as claimed in claim 1, wherein the circuit active fin lines are formed at a first pitch, and the circuit gate lines are formed at a second pitch.
 3. The layout method as claimed in claim 2, wherein a length of the active fin unit of the cell unit is the same as the second pitch, and a length of the gate unit of the cell unit is the same as the first pitch.
 4. The layout method as claimed in claim 1, wherein the circuit active fin lines are continuously connected to the dummy active fin lines.
 5. The layout method as claimed in claim 1, further comprising determining a design rule before the circuit active fin lines and the circuit gate lines are formed, wherein determining the design rule includes determining a width of the active fin unit and a width of a distance between active pin units adjacent to each other, determining a width of the gate unit and a width of a distance between gate units adjacent to each other, determining a size of the grid unit, and determining the cell unit.
 6. The layout method as claimed in claim 1, wherein setting the grid map using the grid unit includes forming a plurality of grid units, and arranging the plurality of the grid units in the vacant region.
 7. The layout method as claimed in claim 6, wherein forming and arranging the plurality of grid units includes disposing grid units connected to end portions of the circuit active fin lines and the circuit gate lines.
 8. The layout method as claimed in claim 1, further comprising, after the dummy active fin lines and the dummy gate lines are formed, forming a circuit active layout pattern overlapping the circuit active fin lines, and a dummy active layout pattern overlapping the dummy active fin lines, and forming a gate layout pattern to expose a distance between the circuit gate lines and the dummy gate lines.
 9. A layout method, the method comprising: forming first circuit active fin lines and first circuit gate lines intersecting the first circuit active fin lines in a layout region, the first circuit active fin lines being formed at a first pitch and the first circuit gate lines being formed at a second pitch; identifying a vacant region in the first layout region; setting a grid map in the vacant region; and forming dummy active fin lines and dummy gate lines in the vacant region in which the grid map is set, wherein setting the grid map includes forming a plurality of grid units, and arranging the plurality of grid units in the vacant region, wherein forming the dummy active fin lines and the dummy gate lines includes forming a plurality of cell units by interposing a cell unit between the plurality of grid units, wherein the cell unit includes an active fin unit and a gate unit intersecting each other; and wherein an intersection region of the active fin unit and the gate unit of the cell unit is disposed in a central portion of the grid unit.
 10. The layout method as claimed in claim 9, further comprising determining a design rule before forming the first circuit active fin lines and the first circuit gate lines, wherein determining the design rule includes determining cell units, gate units, the first pitch, the second pitch, the grid unit, and the cell unit, wherein the cell units have a first width and are spaced apart from each other by a first distance, wherein the gate units have a second width and are spaced apart from each other by a second distance, wherein the first pitch is a sum of the first width and the first distance, wherein the second pitch is a sum of the second width and the second distance, and wherein the grid unit has a quadrangular shape in which the second pitch is provided as a transversal length and the first pitch is provided as a longitudinal length.
 11. The layout method as claimed in claim 10, wherein: the circuit active fin lines are formed using the cell units, the circuit gate lines are formed using the gate units, and the dummy active fin lines and the dummy gate lines are formed using the cell unit.
 12. The layout method as claimed in claim 9, further comprising forming an auxiliary gate line to a side of the first circuit gate lines, after the first circuit active fin lines and the first circuit gate lines are formed, wherein the auxiliary gate line has a width greater than a width of the circuit gate lines and the dummy gate lines.
 13. The layout method as claimed in claim 12, wherein: the auxiliary gate line is disregarded, while the vacant region is identified, to recognize a positional portion in which the auxiliary gate line is positioned as a vacant region, a portion of the plurality of cell units overlaps the auxiliary gate line, and a cell unit overlapping the auxiliary gate line and a cell unit not satisfying a minimum distance from the auxiliary gate line, among the plurality of cell units, are removed.
 14. The layout method as claimed in claim 9, further comprising determining a second layout region adjacent to the first layout region, wherein while the plurality of grid units are formed, overlapping grid units overlapping a boundary portion between the first layout region and the second layout region are formed, and wherein, while the plurality of cell units are formed, overlapping cell units are formed in the overlapping grid units.
 15. The layout method as claimed in claim 14, further comprising removing the overlapping cell units, after the plurality of cell units are formed. 16.-35. (canceled) 